8/1/2010	11:38:15 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/1/2010	11:38:16 AM	Recipe started at 11:38 AM
8/1/2010	11:38:16 AM	H2 valve closed
8/1/2010	11:38:16 AM	BCl3 valve closed
8/1/2010	11:38:16 AM	PH3 valve closed
8/1/2010	11:38:16 AM	SiCl4 pre valve closed
8/1/2010	11:38:16 AM	SiCl4 post valve closed
8/1/2010	11:38:16 AM	Main Vac valve closed
8/1/2010	11:38:16 AM	Bypass valve closed
8/1/2010	11:38:16 AM	Bubbler valve closed
8/1/2010	11:38:16 AM	Helium valve opened
8/1/2010	11:38:16 AM	Helium MFC set to  500.000000
8/1/2010	11:38:16 AM	H2 MFC set to  0.000000
8/1/2010	11:38:16 AM	BCl3 MFC set to  0.000000
8/1/2010	11:38:16 AM	PHl3 MFC set to  0.000000
8/1/2010	11:38:16 AM	SiCl4 MFC set to  0.000000
8/1/2010	11:38:16 AM	Bypass solenoid MFC set to  0.000000
8/1/2010	11:38:16 AM	Tube furnace set to 0
8/1/2010	11:39:36 AM	Helium valve closed
8/1/2010	11:39:36 AM	H2 valve closed
8/1/2010	11:39:36 AM	BCl3 valve closed
8/1/2010	11:39:36 AM	PH3 valve closed
8/1/2010	11:39:36 AM	SiCl4 pre valve closed
8/1/2010	11:39:36 AM	SiCl4 post valve closed
8/1/2010	11:39:36 AM	Main Vac valve closed
8/1/2010	11:39:36 AM	Bypass valve closed
8/1/2010	11:39:36 AM	Bubbler valve closed
8/1/2010	11:39:36 AM	Helium MFC set to  0.000000
8/1/2010	11:39:36 AM	H2 MFC set to  0.000000
8/1/2010	11:39:36 AM	BCl3 MFC set to  0.000000
8/1/2010	11:39:36 AM	PHl3 MFC set to  0.000000
8/1/2010	11:39:36 AM	SiCl4 MFC set to  0.000000
8/1/2010	11:39:36 AM	Bypass solenoid MFC set to  0.000000
8/1/2010	11:39:36 AM	Tube furnace set to 0
8/1/2010	11:39:37 AM	Run finished at 11:39 AM
8/1/2010	11:39:37 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/1/2010	11:42:52 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/1/2010	11:42:52 AM	Recipe started at 11:42 AM
8/1/2010	11:42:52 AM	Helium valve closed
8/1/2010	11:42:52 AM	H2 valve closed
8/1/2010	11:42:52 AM	BCl3 valve closed
8/1/2010	11:42:52 AM	PH3 valve closed
8/1/2010	11:42:52 AM	SiCl4 pre valve closed
8/1/2010	11:42:52 AM	SiCl4 post valve closed
8/1/2010	11:42:52 AM	Main Vac valve closed
8/1/2010	11:42:52 AM	Bubbler valve closed
8/1/2010	11:42:52 AM	Bypass valve opened
8/1/2010	11:42:52 AM	Helium MFC set to  0.000000
8/1/2010	11:42:52 AM	H2 MFC set to  0.000000
8/1/2010	11:42:52 AM	BCl3 MFC set to  0.000000
8/1/2010	11:42:52 AM	PHl3 MFC set to  0.000000
8/1/2010	11:42:52 AM	SiCl4 MFC set to  0.000000
8/1/2010	11:42:52 AM	Bypass solenoid MFC set to  0.000000
8/1/2010	11:42:52 AM	Tube furnace set to 0
8/1/2010	11:43:30 AM	Helium valve closed
8/1/2010	11:43:30 AM	H2 valve closed
8/1/2010	11:43:30 AM	BCl3 valve closed
8/1/2010	11:43:30 AM	PH3 valve closed
8/1/2010	11:43:30 AM	SiCl4 pre valve closed
8/1/2010	11:43:30 AM	SiCl4 post valve closed
8/1/2010	11:43:30 AM	Bubbler valve closed
8/1/2010	11:43:30 AM	Main Vac valve opened
8/1/2010	11:43:30 AM	Bypass valve opened
8/1/2010	11:43:30 AM	Helium MFC set to  0.000000
8/1/2010	11:43:30 AM	H2 MFC set to  0.000000
8/1/2010	11:43:30 AM	BCl3 MFC set to  0.000000
8/1/2010	11:43:30 AM	PHl3 MFC set to  0.000000
8/1/2010	11:43:30 AM	SiCl4 MFC set to  0.000000
8/1/2010	11:43:30 AM	Bypass solenoid MFC set to  0.000000
8/1/2010	11:43:30 AM	Tube furnace set to 0
8/1/2010	11:43:30 AM	Run finished at 11:43 AM
8/1/2010	11:43:30 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/1/2010	4:43:21 PM	Helium valve opened
8/1/2010	4:43:25 PM	Helium MFC set to  100.000000
8/1/2010	4:48:11 PM	Helium MFC set to  0.000000
8/1/2010	4:48:12 PM	Helium valve closed
8/1/2010	6:47:34 PM	Bypass valve closed
8/1/2010	6:47:35 PM	Main Vac valve closed
8/1/2010	6:47:39 PM	Main Vac valve opened
8/1/2010	6:47:39 PM	Bypass valve opened
8/1/2010	6:47:43 PM	Tube furnace set to 100
8/1/2010	6:58:52 PM	Recipe started at 6:58 PM
8/1/2010	6:58:52 PM	Helium valve closed
8/1/2010	6:58:52 PM	BCl3 valve closed
8/1/2010	6:58:52 PM	PH3 valve closed
8/1/2010	6:58:52 PM	SiCl4 pre valve closed
8/1/2010	6:58:52 PM	SiCl4 post valve closed
8/1/2010	6:58:52 PM	Main Vac valve closed
8/1/2010	6:58:52 PM	Bypass valve closed
8/1/2010	6:58:52 PM	Bubbler valve closed
8/1/2010	6:58:52 PM	H2 valve opened
8/1/2010	6:58:52 PM	Helium MFC set to  0.000000
8/1/2010	6:58:52 PM	H2 MFC set to  500.000000
8/1/2010	6:58:52 PM	BCl3 MFC set to  0.000000
8/1/2010	6:58:52 PM	PHl3 MFC set to  0.000000
8/1/2010	6:58:52 PM	SiCl4 MFC set to  0.000000
8/1/2010	6:58:52 PM	Bypass solenoid MFC set to  0.000000
8/1/2010	6:58:52 PM	Tube furnace set to 100
8/1/2010	7:00:12 PM	Helium valve closed
8/1/2010	7:00:12 PM	BCl3 valve closed
8/1/2010	7:00:12 PM	PH3 valve closed
8/1/2010	7:00:12 PM	SiCl4 pre valve closed
8/1/2010	7:00:12 PM	SiCl4 post valve closed
8/1/2010	7:00:12 PM	Main Vac valve closed
8/1/2010	7:00:12 PM	Bypass valve closed
8/1/2010	7:00:12 PM	H2 valve opened
8/1/2010	7:00:12 PM	Bubbler valve opened
8/1/2010	7:00:12 PM	Helium MFC set to  0.000000
8/1/2010	7:00:12 PM	H2 MFC set to  500.000000
8/1/2010	7:00:12 PM	BCl3 MFC set to  0.000000
8/1/2010	7:00:12 PM	PHl3 MFC set to  0.000000
8/1/2010	7:00:12 PM	SiCl4 MFC set to  0.000000
8/1/2010	7:00:12 PM	Bypass solenoid MFC set to  0.000000
8/1/2010	7:00:12 PM	Tube furnace set to 1000
8/1/2010	7:20:12 PM	Helium valve closed
8/1/2010	7:20:12 PM	PH3 valve closed
8/1/2010	7:20:12 PM	Main Vac valve closed
8/1/2010	7:20:12 PM	Bypass valve closed
8/1/2010	7:20:12 PM	H2 valve opened
8/1/2010	7:20:12 PM	BCl3 valve opened
8/1/2010	7:20:12 PM	SiCl4 pre valve opened
8/1/2010	7:20:12 PM	SiCl4 post valve opened
8/1/2010	7:20:12 PM	Bubbler valve opened
8/1/2010	7:20:12 PM	Helium MFC set to  0.000000
8/1/2010	7:20:12 PM	H2 MFC set to  500.000000
8/1/2010	7:20:12 PM	BCl3 MFC set to  29.000000
8/1/2010	7:20:12 PM	PHl3 MFC set to  0.000000
8/1/2010	7:20:12 PM	SiCl4 MFC set to  50.000000
8/1/2010	7:20:12 PM	Bypass solenoid MFC set to  0.000000
8/1/2010	7:20:12 PM	Tube furnace set to 1000
8/1/2010	7:30:12 PM	H2 valve closed
8/1/2010	7:30:12 PM	BCl3 valve closed
8/1/2010	7:30:12 PM	PH3 valve closed
8/1/2010	7:30:12 PM	SiCl4 pre valve closed
8/1/2010	7:30:12 PM	SiCl4 post valve closed
8/1/2010	7:30:12 PM	Main Vac valve closed
8/1/2010	7:30:12 PM	Bypass valve closed
8/1/2010	7:30:12 PM	Helium valve opened
8/1/2010	7:30:12 PM	Bubbler valve opened
8/1/2010	7:30:12 PM	Helium MFC set to  500.000000
8/1/2010	7:30:12 PM	H2 MFC set to  0.000000
8/1/2010	7:30:12 PM	BCl3 MFC set to  0.000000
8/1/2010	7:30:12 PM	PHl3 MFC set to  0.000000
8/1/2010	7:30:12 PM	SiCl4 MFC set to  0.000000
8/1/2010	7:30:12 PM	Bypass solenoid MFC set to  0.000000
8/1/2010	7:30:12 PM	Tube furnace set to 0
8/1/2010	7:50:12 PM	Helium valve closed
8/1/2010	7:50:12 PM	H2 valve closed
8/1/2010	7:50:12 PM	BCl3 valve closed
8/1/2010	7:50:12 PM	PH3 valve closed
8/1/2010	7:50:12 PM	SiCl4 pre valve closed
8/1/2010	7:50:12 PM	SiCl4 post valve closed
8/1/2010	7:50:12 PM	Main Vac valve closed
8/1/2010	7:50:12 PM	Bypass valve closed
8/1/2010	7:50:12 PM	Bubbler valve closed
8/1/2010	7:50:12 PM	Helium MFC set to  0.000000
8/1/2010	7:50:12 PM	H2 MFC set to  0.000000
8/1/2010	7:50:12 PM	BCl3 MFC set to  0.000000
8/1/2010	7:50:12 PM	PHl3 MFC set to  0.000000
8/1/2010	7:50:12 PM	SiCl4 MFC set to  0.000000
8/1/2010	7:50:12 PM	Bypass solenoid MFC set to  0.000000
8/1/2010	7:50:12 PM	Tube furnace set to 0
8/1/2010	7:50:12 PM	Run finished at 7:50 PM
8/1/2010	8:01:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/1/2010	8:01:58 PM	Recipe started at 8:01 PM
8/1/2010	8:01:58 PM	Helium valve closed
8/1/2010	8:01:58 PM	H2 valve closed
8/1/2010	8:01:58 PM	BCl3 valve closed
8/1/2010	8:01:58 PM	PH3 valve closed
8/1/2010	8:01:58 PM	SiCl4 pre valve closed
8/1/2010	8:01:58 PM	SiCl4 post valve closed
8/1/2010	8:01:58 PM	Main Vac valve closed
8/1/2010	8:01:58 PM	Bubbler valve closed
8/1/2010	8:01:58 PM	Bypass valve opened
8/1/2010	8:01:58 PM	Helium MFC set to  0.000000
8/1/2010	8:01:58 PM	H2 MFC set to  0.000000
8/1/2010	8:01:58 PM	BCl3 MFC set to  0.000000
8/1/2010	8:01:58 PM	PHl3 MFC set to  0.000000
8/1/2010	8:01:58 PM	SiCl4 MFC set to  0.000000
8/1/2010	8:01:58 PM	Bypass solenoid MFC set to  0.000000
8/1/2010	8:01:58 PM	Tube furnace set to 0
8/1/2010	8:02:36 PM	Helium valve closed
8/1/2010	8:02:36 PM	H2 valve closed
8/1/2010	8:02:36 PM	BCl3 valve closed
8/1/2010	8:02:36 PM	PH3 valve closed
8/1/2010	8:02:36 PM	SiCl4 pre valve closed
8/1/2010	8:02:36 PM	SiCl4 post valve closed
8/1/2010	8:02:36 PM	Bubbler valve closed
8/1/2010	8:02:36 PM	Main Vac valve opened
8/1/2010	8:02:36 PM	Bypass valve opened
8/1/2010	8:02:36 PM	Helium MFC set to  0.000000
8/1/2010	8:02:36 PM	H2 MFC set to  0.000000
8/1/2010	8:02:36 PM	BCl3 MFC set to  0.000000
8/1/2010	8:02:36 PM	PHl3 MFC set to  0.000000
8/1/2010	8:02:36 PM	SiCl4 MFC set to  0.000000
8/1/2010	8:02:36 PM	Bypass solenoid MFC set to  0.000000
8/1/2010	8:02:36 PM	Tube furnace set to 0
8/1/2010	8:02:36 PM	Run finished at 8:02 PM
8/1/2010	8:02:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/1/2010	8:02:49 PM	Tube furnace set to 100
8/1/2010	9:37:03 PM	Helium valve opened
8/1/2010	9:37:05 PM	Helium MFC set to  100.000000
8/1/2010	9:46:33 PM	Helium valve closed
8/1/2010	9:46:35 PM	Helium MFC set to  0.000000
8/1/2010	9:47:16 PM	Bypass valve closed
8/1/2010	9:47:16 PM	Main Vac valve closed
8/1/2010	9:47:20 PM	Main Vac valve opened
8/1/2010	9:47:20 PM	Bypass valve opened
8/1/2010	9:47:41 PM	Recipe started at 9:47 PM
8/1/2010	9:47:41 PM	Helium valve closed
8/1/2010	9:47:41 PM	BCl3 valve closed
8/1/2010	9:47:41 PM	PH3 valve closed
8/1/2010	9:47:41 PM	SiCl4 pre valve closed
8/1/2010	9:47:41 PM	SiCl4 post valve closed
8/1/2010	9:47:41 PM	Main Vac valve closed
8/1/2010	9:47:41 PM	Bypass valve closed
8/1/2010	9:47:41 PM	Bubbler valve closed
8/1/2010	9:47:41 PM	H2 valve opened
8/1/2010	9:47:41 PM	Helium MFC set to  0.000000
8/1/2010	9:47:41 PM	H2 MFC set to  500.000000
8/1/2010	9:47:41 PM	BCl3 MFC set to  0.000000
8/1/2010	9:47:41 PM	PHl3 MFC set to  0.000000
8/1/2010	9:47:41 PM	SiCl4 MFC set to  0.000000
8/1/2010	9:47:41 PM	Bypass solenoid MFC set to  0.000000
8/1/2010	9:47:41 PM	Tube furnace set to 100
8/1/2010	9:49:01 PM	Helium valve closed
8/1/2010	9:49:01 PM	BCl3 valve closed
8/1/2010	9:49:01 PM	PH3 valve closed
8/1/2010	9:49:01 PM	SiCl4 pre valve closed
8/1/2010	9:49:01 PM	SiCl4 post valve closed
8/1/2010	9:49:01 PM	Main Vac valve closed
8/1/2010	9:49:01 PM	Bypass valve closed
8/1/2010	9:49:01 PM	H2 valve opened
8/1/2010	9:49:01 PM	Bubbler valve opened
8/1/2010	9:49:01 PM	Helium MFC set to  0.000000
8/1/2010	9:49:01 PM	H2 MFC set to  500.000000
8/1/2010	9:49:01 PM	BCl3 MFC set to  0.000000
8/1/2010	9:49:01 PM	PHl3 MFC set to  0.000000
8/1/2010	9:49:01 PM	SiCl4 MFC set to  0.000000
8/1/2010	9:49:01 PM	Bypass solenoid MFC set to  0.000000
8/1/2010	9:49:01 PM	Tube furnace set to 1000
8/1/2010	10:09:01 PM	Helium valve closed
8/1/2010	10:09:01 PM	PH3 valve closed
8/1/2010	10:09:01 PM	Main Vac valve closed
8/1/2010	10:09:01 PM	Bypass valve closed
8/1/2010	10:09:01 PM	H2 valve opened
8/1/2010	10:09:01 PM	BCl3 valve opened
8/1/2010	10:09:01 PM	SiCl4 pre valve opened
8/1/2010	10:09:01 PM	SiCl4 post valve opened
8/1/2010	10:09:01 PM	Bubbler valve opened
8/1/2010	10:09:01 PM	Helium MFC set to  0.000000
8/1/2010	10:09:01 PM	H2 MFC set to  500.000000
8/1/2010	10:09:01 PM	BCl3 MFC set to  29.000000
8/1/2010	10:09:01 PM	PHl3 MFC set to  0.000000
8/1/2010	10:09:01 PM	SiCl4 MFC set to  50.000000
8/1/2010	10:09:01 PM	Bypass solenoid MFC set to  0.000000
8/1/2010	10:09:01 PM	Tube furnace set to 1000
8/1/2010	10:19:01 PM	H2 valve closed
8/1/2010	10:19:01 PM	BCl3 valve closed
8/1/2010	10:19:01 PM	PH3 valve closed
8/1/2010	10:19:01 PM	SiCl4 pre valve closed
8/1/2010	10:19:01 PM	SiCl4 post valve closed
8/1/2010	10:19:01 PM	Main Vac valve closed
8/1/2010	10:19:01 PM	Bypass valve closed
8/1/2010	10:19:01 PM	Helium valve opened
8/1/2010	10:19:01 PM	Bubbler valve opened
8/1/2010	10:19:01 PM	Helium MFC set to  500.000000
8/1/2010	10:19:01 PM	H2 MFC set to  0.000000
8/1/2010	10:19:01 PM	BCl3 MFC set to  0.000000
8/1/2010	10:19:01 PM	PHl3 MFC set to  0.000000
8/1/2010	10:19:01 PM	SiCl4 MFC set to  0.000000
8/1/2010	10:19:01 PM	Bypass solenoid MFC set to  0.000000
8/1/2010	10:19:02 PM	Tube furnace set to 0
8/1/2010	10:39:02 PM	Helium valve closed
8/1/2010	10:39:02 PM	H2 valve closed
8/1/2010	10:39:02 PM	BCl3 valve closed
8/1/2010	10:39:02 PM	PH3 valve closed
8/1/2010	10:39:02 PM	SiCl4 pre valve closed
8/1/2010	10:39:02 PM	SiCl4 post valve closed
8/1/2010	10:39:02 PM	Main Vac valve closed
8/1/2010	10:39:02 PM	Bypass valve closed
8/1/2010	10:39:02 PM	Bubbler valve closed
8/1/2010	10:39:02 PM	Helium MFC set to  0.000000
8/1/2010	10:39:02 PM	H2 MFC set to  0.000000
8/1/2010	10:39:02 PM	BCl3 MFC set to  0.000000
8/1/2010	10:39:02 PM	PHl3 MFC set to  0.000000
8/1/2010	10:39:02 PM	SiCl4 MFC set to  0.000000
8/1/2010	10:39:02 PM	Bypass solenoid MFC set to  0.000000
8/1/2010	10:39:02 PM	Tube furnace set to 0
8/1/2010	10:39:02 PM	Run finished at 10:39 PM
8/1/2010	10:53:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/1/2010	10:53:29 PM	Recipe started at 10:53 PM
8/1/2010	10:53:29 PM	Helium valve closed
8/1/2010	10:53:29 PM	H2 valve closed
8/1/2010	10:53:29 PM	BCl3 valve closed
8/1/2010	10:53:29 PM	PH3 valve closed
8/1/2010	10:53:29 PM	SiCl4 pre valve closed
8/1/2010	10:53:29 PM	SiCl4 post valve closed
8/1/2010	10:53:29 PM	Main Vac valve closed
8/1/2010	10:53:29 PM	Bubbler valve closed
8/1/2010	10:53:29 PM	Bypass valve opened
8/1/2010	10:53:29 PM	Helium MFC set to  0.000000
8/1/2010	10:53:29 PM	H2 MFC set to  0.000000
8/1/2010	10:53:29 PM	BCl3 MFC set to  0.000000
8/1/2010	10:53:29 PM	PHl3 MFC set to  0.000000
8/1/2010	10:53:29 PM	SiCl4 MFC set to  0.000000
8/1/2010	10:53:29 PM	Bypass solenoid MFC set to  0.000000
8/1/2010	10:53:29 PM	Tube furnace set to 0
8/1/2010	10:54:06 PM	Helium valve closed
8/1/2010	10:54:06 PM	H2 valve closed
8/1/2010	10:54:06 PM	BCl3 valve closed
8/1/2010	10:54:06 PM	PH3 valve closed
8/1/2010	10:54:06 PM	SiCl4 pre valve closed
8/1/2010	10:54:06 PM	SiCl4 post valve closed
8/1/2010	10:54:06 PM	Bubbler valve closed
8/1/2010	10:54:06 PM	Main Vac valve opened
8/1/2010	10:54:06 PM	Bypass valve opened
8/1/2010	10:54:06 PM	Helium MFC set to  0.000000
8/1/2010	10:54:06 PM	H2 MFC set to  0.000000
8/1/2010	10:54:06 PM	BCl3 MFC set to  0.000000
8/1/2010	10:54:06 PM	PHl3 MFC set to  0.000000
8/1/2010	10:54:06 PM	SiCl4 MFC set to  0.000000
8/1/2010	10:54:06 PM	Bypass solenoid MFC set to  0.000000
8/1/2010	10:54:06 PM	Tube furnace set to 0
8/1/2010	10:54:07 PM	Run finished at 10:54 PM
8/1/2010	10:54:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/1/2010	10:54:16 PM	Tube furnace set to 100
8/1/2010	11:12:55 PM	Helium valve opened
8/1/2010	11:12:57 PM	Helium MFC set to  100.000000
8/1/2010	11:41:50 PM	Helium valve closed
8/1/2010	11:41:52 PM	Helium MFC set to  0.000000
8/1/2010	11:42:57 PM	Recipe started at 11:42 PM
8/1/2010	11:42:57 PM	Helium valve closed
8/1/2010	11:42:57 PM	BCl3 valve closed
8/1/2010	11:42:57 PM	PH3 valve closed
8/1/2010	11:42:57 PM	SiCl4 pre valve closed
8/1/2010	11:42:57 PM	SiCl4 post valve closed
8/1/2010	11:42:57 PM	Main Vac valve closed
8/1/2010	11:42:57 PM	Bypass valve closed
8/1/2010	11:42:57 PM	Bubbler valve closed
8/1/2010	11:42:57 PM	H2 valve opened
8/1/2010	11:42:58 PM	Helium MFC set to  0.000000
8/1/2010	11:42:58 PM	H2 MFC set to  500.000000
8/1/2010	11:42:58 PM	BCl3 MFC set to  0.000000
8/1/2010	11:42:58 PM	PHl3 MFC set to  0.000000
8/1/2010	11:42:58 PM	SiCl4 MFC set to  0.000000
8/1/2010	11:42:58 PM	Bypass solenoid MFC set to  0.000000
8/1/2010	11:42:58 PM	Tube furnace set to 100
8/1/2010	11:44:17 PM	Helium valve closed
8/1/2010	11:44:17 PM	BCl3 valve closed
8/1/2010	11:44:17 PM	PH3 valve closed
8/1/2010	11:44:17 PM	SiCl4 pre valve closed
8/1/2010	11:44:17 PM	SiCl4 post valve closed
8/1/2010	11:44:17 PM	Main Vac valve closed
8/1/2010	11:44:17 PM	Bypass valve closed
8/1/2010	11:44:17 PM	H2 valve opened
8/1/2010	11:44:17 PM	Bubbler valve opened
8/1/2010	11:44:17 PM	Helium MFC set to  0.000000
8/1/2010	11:44:17 PM	H2 MFC set to  500.000000
8/1/2010	11:44:17 PM	BCl3 MFC set to  0.000000
8/1/2010	11:44:17 PM	PHl3 MFC set to  0.000000
8/1/2010	11:44:17 PM	SiCl4 MFC set to  0.000000
8/1/2010	11:44:17 PM	Bypass solenoid MFC set to  0.000000
8/1/2010	11:44:17 PM	Tube furnace set to 1000
